Double-gate Si junction-less n-type transistor for high performance Cu-BEOL compatible applications using 3D sequential integration

Vandooren, AnneAnneVandoorenWitters, LiesbethLiesbethWittersVecchio, EmmaEmmaVecchioKunnen, EddyEddyKunnenHellings, GeertGeertHellingsPeng, LanLanPengInoue, FumihiroFumihiroInoueLi, WaikinWaikinLiWaldron, NiamhNiamhWaldronMocuta, DanDanMocutaCollaert, NadineNadineCollaert2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29773Double-gate Si junction-less n-type transistor for high performance Cu-BEOL compatible applications using 3D sequential integrationProceedings paperhttp://ieeexplore.ieee.org/document/8309234/