Laser annealed junctions: pocket profile analysis using an atomistic kinetic Monte Carlo approach

Noda, TaijiTaijiNodaOrtolland, ClaudeClaudeOrtollandVandervorst, WilfriedWilfriedVandervorstVrancken, ChristaChristaVranckenRosseel, ErikErikRosseelClarysse, TrudoTrudoClarysseAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17704Laser annealed junctions: pocket profile analysis using an atomistic kinetic Monte Carlo approachProceedings paper