Defect control for Ge/Si and Ge1-xSnx/Ge/Si heterostructures

Sakai, AkiraAkiraSakaiTakeuchi, ShotaroShotaroTakeuchiNakatsuka, OsamuOsamuNakatsukaOgawa, MasakiMasakiOgawaZaima, ShigeakiShigeakiZaima2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12834Defect control for Ge/Si and Ge1-xSnx/Ge/Si heterostructuresMeeting abstracthttp://www.comp.metro-u.ac.jp/iscsi-5/