Interface control of high k gate dielectrics on Ge

Caymax, MattyMattyCaymaxHoussa, MichelMichelHoussaPourtois, GeoffreyGeoffreyPourtoisBellenger, FlorenceFlorenceBellengerMartens, KoenKoenMartensDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan Elshocht2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11835Interface control of high k gate dielectrics on GeProceedings paper