Overcoming barrier integrity issues of I-PVD deposited Ta(N) barriers on inorganic porous low-k's

Iacopi, FrancescaFrancescaIacopiTokei, ZsoltZsoltTokeiShamiryan, DenisDenisShamiryanLe, Quoc ToanQuoc ToanLeMalhouitre, StéphaneStéphaneMalhouitreVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6420Overcoming barrier integrity issues of I-PVD deposited Ta(N) barriers on inorganic porous low-k'sProceedings paper