Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

Doise, JanJanDoiseChan, BTBTChanHori, MasafumiMasafumiHoriGronheid, RoelRoelGronheid2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28265Dual brush process for selective surface modification in graphoepitaxy directed self-assemblyProceedings paper10.1117/12.2259791