Post dry-etch cleaning issues of an organic low-K dielectric

Lanckmans, FilipFilipLanckmansBaklanov, MikhaïlMikhaïlBaklanovAlaerts, CarineCarineAlaertsVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2705Post dry-etch cleaning issues of an organic low-K dielectricOral presentation