The use of in situ electrochemical measurements to predict corrosion issues during barrier CMP of 30 nm structures

Teugels, LieveLieveTeugelsHeylen, NancyNancyHeylenLeunissen, PeterPeterLeunissen2021-10-192021-10-192011-08https://imec-publications.be/handle/20.500.12860/19878The use of in situ electrochemical measurements to predict corrosion issues during barrier CMP of 30 nm structuresProceedings paper