Properties of shallowly etched second order grating in silicon-on-insulator (SOI) waveguide

Li, LianyanLianyanLiLi, YanLuYanLuLiMorthier, GeertGeertMorthier2021-10-212021-10-212013-05https://imec-publications.be/handle/20.500.12860/22680Properties of shallowly etched second order grating in silicon-on-insulator (SOI) waveguideProceedings paper