An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films

Levrau, ElisabethElisabethLevrauDevloo-Casier, KKDevloo-CasierDendooven, JolienJolienDendoovenVerdonck, PatrickPatrickVerdonckBaklanov, MikhaïlMikhaïlBaklanovDetavernier, ChristophChristophDetavernier2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22674An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k filmsMeeting abstract