Investigation of plasma hydrogenation and trapping mechanism for layer transfer

Chen, PengPengChenChu, Paul K.Paul K.ChuHochbauer, T.T.HochbauerLee, J-KJ-KLeeNastasi, M.M.NastasiBuca, D.D.BucaMantl, SSMantlLoo, RogerRogerLooCaymax, MattyMattyCaymaxAlford, T.T.AlfordMayer, J.W.J.W.MayerDavid Theodore, N.N.David TheodoreCai, M.M.CaiSchmidt, B.B.SchmidtLau, S.S.S.S.Lau2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10210Investigation of plasma hydrogenation and trapping mechanism for layer transferJournal article