Radisic, DunjaDunjaRadisicShamiryan, DenisDenisShamiryanMannaert, GeertGeertMannaertBoullart, WernerWernerBoullartRosseel, ErikErikRosseelBogdanowicz, JanuszJanuszBogdanowiczGoossens, JozefienJozefienGoossensMarrant, KoenKoenMarrantBender, HugoHugoBenderSonnemans, RogerRogerSonnemansBerry, IvanIvanBerry2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16073Metrology for implanted Si substrate and dopant loss studiesProceedings paper