EUV detectors based on AlGaN-on-Si Schottky photodiodes

Malinowski, PawelPawelMalinowskiDuboz, Jean-YvesJean-YvesDubozDe Moor, PietPietDe MoorMinoglou, KikiKikiMinoglouJohn, JoachimJoachimJohnSrivastava, PuneetPuneetSrivastavaSemond, FabriceFabriceSemondFrayssinet, EricEricFrayssinetBenMoussa, AliAliBenMoussaGiordanengo, BorisBorisGiordanengoVan Hoof, ChrisChrisVan HoofMertens, RobertRobertMertens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19367EUV detectors based on AlGaN-on-Si Schottky photodiodesMeeting abstract