Machkaoutsan, VladimirVladimirMachkaoutsanBauer, MatthiasMatthiasBauerZhang, Y.Y.ZhangKoelling, SebastianSebastianKoellingFranquet, AlexisAlexisFranquetVanormelingen, KoenKoenVanormelingenVerheyen, PeterPeterVerheyenLoo, RogerRogerLooKim, Chul SungChul SungKimLauwers, AnneAnneLauwersHoffmann, Thomas Y.Thomas Y.HoffmannAbsil, PhilippePhilippeAbsilGranneman, ErnstErnstGrannemanVandervorst, WilfriedWilfriedVandervorstThomas, Shawn. GShawn. GThomas2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15775First electrical demonstration of DRAM compatible Ni silicidesOral presentation