Van Den Heuvel, DieterDieterVan Den HeuvelBeral, ChristopheChristopheBeralChowrira Poovanna BhavishyaFoubert, PhilippePhilippeFoubertDe Simone, DaniloDaniloDe SimoneLorusso, GianGianLorussoBeggiato, MatteoMatteoBeggiatoDas, ShubhankarShubhankarDasCharley, Anne-LaureAnne-LaureCharleySugie, M.M.SugieBan, N.N.BanKoike, H.H.KoikeIsawa, M.M.IsawaSun, W.W.Sun2024-06-152024-06-152024978-1-5106-7216-10277-786XWOS:001224296200109https://imec-publications.be/handle/20.500.12860/44051Defect inspection methodology for Contact HolesProceedings paper10.1117/12.3015844978-1-5106-7217-8WOS:001224296200109