Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials

de Marneffe, Jean-FrancoisJean-Francoisde MarneffeFujikawa, T.M.T.M.FujikawaYamaguchi, T.T.YamaguchiNozawa, S.S.NozawaNiino, R.R.NiinoSato, N.N.SatoChanson, R.R.ChansonBabaei Gavan, KhashayarKhashayarBabaei GavanRezvanov, AskarAskarRezvanovLazzarino, FredericFredericLazzarinoTokei, ZsoltZsoltTokei2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30534Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materialsMeeting abstracthttps://www2.avs.org/symposium2018/ProgramBooks/ProgramBook_Session_PS+EM-WeA.pdf