Cascaded Mach-Zehnder filters in silicon-on-insulator photonic wires fabricated with deep UV lithography

Dumon, PieterPieterDumonBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutTaillaert, DirkDirkTaillaertWiaux, VincentVincentWiauxBeckx, StephanStephanBeckxWouters, Johan M. D.Johan M. D.WoutersBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8866Cascaded Mach-Zehnder filters in silicon-on-insulator photonic wires fabricated with deep UV lithographyProceedings paper