Wang, LinghuaLinghuaWangLi, YanLuYanLuLiPorcel, Marco GarciaMarco GarciaPorcelVermeulen, DiedrikDiedrikVermeulenHan, X.X.HanWang, JinyanJinyanWangJian, XigaoXigaoJianBaets, RoelRoelBaetsZhao, MingshanMingshanZhaoMorthier, GeertGeertMorthier2021-10-202021-10-202012-060021-8979https://imec-publications.be/handle/20.500.12860/21835A polymer-based surface grating coupler with an ambedded Si3N4 layerJournal article