Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ silicon

Rafi, Joan MarcJoan MarcRafiSimoen, EddyEddySimoenClaeys, CorCorClaeysHuang, Y.L.Y.L.HuangUlyashin, A.G.A.G.UlyashinJob, R.R.JobVersluys, J.J.VersluysClauws, PPClauwsLozano, M.M.LozanoCampabadal, F.F.Campabadal2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11074Impact of direct plasma hydrogenation on thermal donor formation in N-type CZ siliconJournal article