Formation of germanium shallow junction by flash annealing

Satta, AlessandraAlessandraSattaD'Amore, AntonioAntonioD'AmoreSimoen, EddyEddySimoenAnwand, WWAnwandSkorupa, WWSkorupaClarysse, TrudoTrudoClarysseVan Daele, BennyBennyVan DaeleJanssens, TomTomJanssens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12841Formation of germanium shallow junction by flash annealingJournal article