Improved fin width scaling in fully-depleted FinFETs

Duffy, RayRayDuffyVan Dal, MarkMarkVan DalPawlak, BartekBartekPawlakCollaert, NadineNadineCollaertWitters, LiesbethLiesbethWittersRooyackers, RitaRitaRooyackersKaiser, M.M.KaiserWeemaes, R. G. R.R. G. R.WeemaesJurczak, GosiaGosiaJurczakLander, RobRobLander2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13680Improved fin width scaling in fully-depleted FinFETsProceedings paper