Study of the anisotropic wet etching of nanoscale structures in alkaline solutions

Pacco, AntoineAntoinePaccoAabdin, ZainulZainulAabdinAnand, UtkarshUtkarshAnandRip, JensJensRipMirsaidov, UtkurUtkurMirsaidovHolsteyns, FrankFrankHolsteyns2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31467Study of the anisotropic wet etching of nanoscale structures in alkaline solutionsProceedings paperhttps://www.scientific.net/SSP.282.88