A fully planar stacked gate flash technology with T-shaped floating gate for increased cell coupling ratio

De Vos, JoeriJoeriDe VosHaspeslagh, LucLucHaspeslaghBlomme, PieterPieterBlommeDemand, MarcMarcDemandDevriendt, KatiaKatiaDevriendtVleugels, FrankFrankVleugelsWellekens, DirkDirkWellekensVan Houdt, JanJanVan Houdt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11996A fully planar stacked gate flash technology with T-shaped floating gate for increased cell coupling ratioProceedings paper