Gonzalez, PilarPilarGonzalezRakowski, MichalMichalRakowskiSan Segundo Bello, DavidDavidSan Segundo BelloSeveri, SimoneSimoneSeveriDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-202021-10-2020120741-3106https://imec-publications.be/handle/20.500.12860/20738CMOS-integrated poly-SiGe piezoresistive pressure sensorJournal article