Potentialities and limitations of low-energy TOF-ERDA for high resolution and quantitative profiling of thin films

Giangrandi, SimoneSimoneGiangrandiBrijs, BertBertBrijsArstial, K.K.ArstialSajavaara, T.T.SajavaaraVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12194Potentialities and limitations of low-energy TOF-ERDA for high resolution and quantitative profiling of thin filmsOral presentation