Intermetallic Compounds as Alternatives to Copper for Advanced Interconnect Metallization

Adelmann, ChristophChristophAdelmannSoulie, Jean-PhilippeJean-PhilippeSoulieScheerder, JeroenJeroenScheerderFleischmann, ClaudiaClaudiaFleischmannSankaran, KiroubanandKiroubanandSankaranPourtois, GeoffreyGeoffreyPourtoisSwerts, JohanJohanSwertsTokei, ZsoltZsoltTokei2024-05-272023-08-072024-05-2720232380-632XWOS:001027381700040https://imec-publications.be/handle/20.500.12860/42291Intermetallic Compounds as Alternatives to Copper for Advanced Interconnect MetallizationProceedings paper10.1109/IITC/MAM57687.2023.10154839979-8-3503-1097-9WOS:001027381700040