Negligible effect of process-induced strain on intrinsic NBTI behavior

Shickova, AdelinaAdelinaShickovaKaczer, BenBenKaczerVerheyen, PeterPeterVerheyenEneman, GeertGeertEnemanSan Andres Serrano, EnriqueEnriqueSan Andres SerranoJurczak, GosiaGosiaJurczakAbsil, PhilippePhilippeAbsilMaes, HermanHermanMaesGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12892Negligible effect of process-induced strain on intrinsic NBTI behaviorJournal article