Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

Hoechst, A.A.HoechstScheuerer, R.R.ScheuererStahl, H.H.StahlFischer, F.F.FischerMetzger, L.L.MetzgerReichenbach, R.R.ReichenbachLaermer, F.F.LaermerKronmueller, S.S.KronmuellerWatcham, S.S.WatchamRusu, CristinaCristinaRusuWitvrouw, AnnAnnWitvrouwGunn, R.R.Gunn2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9040Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layerJournal article