Vantomme, AndreAndreVantommeHogg, S. M.S. M.HoggWu, Ming FangMing FangWuPipeleers, B.B.PipeleersSwart, M.M.SwartGoodman, S.S.GoodmanAuret, D.D.AuretIakoubovskii, K.K.IakoubovskiiAdriaenssens, G. J.G. J.AdriaenssensJacobs, KoenKoenJacobsMoerman, IngridIngridMoerman2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5800Suppression of rare-earth implantation-induced damage in GaNJournal article