Mitard, JeromeJeromeMitardDe Jaeger, BriceBriceDe JaegerEneman, GeertGeertEnemanBrunco, DavidDavidBruncoLeys, FrederikFrederikLeysWinderickx, GillisGillisWinderickxPourtois, GeoffreyGeoffreyPourtoisHoussa, MichelMichelHoussaMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14175Optimization of epitaxial Si passivation for Ge p-MOSFETsMeeting abstract