Merckling, ClementClementMercklingJiang, SijiaSijiaJiangLiu, ZiyangZiyangLiuWaldron, NiamhNiamhWaldronBoccardi, GuillaumeGuillaumeBoccardiRooyackers, RitaRitaRooyackersWang, ZhechaoZhechaoWangTian, BinBinTianPantouvaki, MariannaMariannaPantouvakiCollaert, NadineNadineCollaertVan Campenhout, JorisJorisVan CampenhoutHeyns, MarcMarcHeynsVan Thourhout, DriesDriesVan ThourhoutVandervorst, WilfriedWilfriedVandervorstThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25640Monolithic integration of III-V semiconductors by selective area growth on Si(001) substrate: epitaxy challenges & applicationsProceedings paperhttps://doi.org/10.1149/06604.0107ecst