The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation

Green, Martin L.Martin L.GreenLi, XuefaXuefaLiWang, JinJinWangAllen, Andrew J.Andrew J.AllenDelabie, AnneliesAnneliesDelabiePuurunen, RiikkaRiikkaPuurunenBrijs, BertBertBrijsVanhaeren, DanielleDanielleVanhaeren2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8981The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiationProceedings paper