Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean

Li, YunlongYunlongLiHeylen, NancyNancyHeylenDaviot, JeromeJeromeDaviotReid, ChrisChrisReidLeunissen, PeterPeterLeunissen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17489Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP cleanMeeting abstract