Endurance failure mechanisms in TiN\Ta2O5\Ta RRAM stack

Chen, MichaelMichaelChenGoux, LudovicLudovicGouxFantini, AndreaAndreaFantiniClima, SergiuSergiuClimaDegraeve, RobinRobinDegraeveRedolfi, AugustoAugustoRedolfiChen, YangyinYangyinChenGroeseneken, GuidoGuidoGroesenekenJurczak, GosiaGosiaJurczak2021-10-222021-10-2220150003-6951https://imec-publications.be/handle/20.500.12860/25064Endurance failure mechanisms in TiN\Ta2O5\Ta RRAM stackJournal articlehttp://scitation.aip.org/content/aip/journal/apl/106/5/10.1063/1.4907573