New approach for the formation and separation of a thin porous silicon layer

Solanki, Chetan SinghChetan SinghSolankiBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmans2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4758New approach for the formation and separation of a thin porous silicon layerProceedings paper