Costantoudis, VassiliosVassiliosCostantoudisPapaverios, GeorgeGeorgePapaveriosLorusso, GianGianLorussoRutigliani, VitoVitoRutiglianiVan Roey, FriedaFriedaVan RoeyGogolides, EvangelosEvangelosGogolides2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30470Multifractal analysis of line-edge roughnessProceedings paperhttps://doi.org/10.1117/12.2306508