Influence of grown-in defects on the optical and electrical properties of Si/Si 1-xGex/Si heterostructures

Loo, RogerRogerLooCaymax, MattyMattyCaymaxSimoen, EddyEddySimoenHoward, DaveDaveHowardGoryll, M.M.GoryllKlaes, D.D.KlaesVescan, L.L.VescanGravesteijn, DirkDirkGravesteijnPetersson, H.H.PeterssonZhang, X.X.Zhang2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2740Influence of grown-in defects on the optical and electrical properties of Si/Si 1-xGex/Si heterostructuresJournal article