Structural and electrical characterization of FeSix-layers (1 < X < 2) prepared by RTA of Fe layers sputtered on Si (100)

Libezny, MilanMilanLibeznyPoortmans, JefJefPoortmansAmesz, Peter HenkPeter HenkAmeszAlves Donaton, RicardoRicardoAlves DonatonLarsen, Kim KyllesbechKim KyllesbechLarsenVandenabeele, PeterPeterVandenabeeleJonckx, FrankyFrankyJonckxMaex, KarenKarenMaexNijs, JohanJohanNijs2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/725Structural and electrical characterization of FeSix-layers (1 < X < 2) prepared by RTA of Fe layers sputtered on Si (100)Proceedings paper