Chamirian, OxanaOxanaChamiriande Potter de ten Broeck, MurielMurielde Potter de ten BroeckLauwers, AnneAnneLauwersRichard, OlivierOlivierRichardLindsay, RichardRichardLindsayVrancken, ChristaChristaVranckenMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7300Sidewall grooving on CoSi2 narrow linesProceedings paper