Trenkler, ThomasThomasTrenklerDe Wolf, PeterPeterDe WolfEyben, PierrePierreEybenHaegeman, BartBartHaegemanStephenson, RobertRobertStephensonHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3888Electrical scanning probe techniques in semiconductor researchOral presentation