Characterization of grain boundaries and impact of plasma-induced patterned in 2D materials

Celano, UmbertoUmbertoCelanoVirkki, OlliOlliVirkkiChiappe, DanieleDanieleChiappeHeyne, MarkusMarkusHeyneHoflijk, IlseIlseHoflijkFranquet, AlexisAlexisFranquetHuyghebaert, CedricCedricHuyghebaertParedis, KristofKristofParedisDe Gendt, StefanStefanDe GendtRadu, IulianaIulianaRaduVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27993Characterization of grain boundaries and impact of plasma-induced patterned in 2D materialsOral presentationhttps://mrsspring.zerista.com/poster/member/84889