Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact

Chiodarelli, NicoloNicoloChiodarellivan der Veen, MarleenMarleenvan der VeenVereecke, BartBartVereeckeCott, DaireDaireCottGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereeckenHuyghebaert, CedricCedricHuyghebaertTokei, ZsoltZsoltTokei2021-10-192021-10-192011-05https://imec-publications.be/handle/20.500.12860/18687Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contactProceedings paperhttp://www.his.com/~iitc/Program%20Draft%20-%20web-v7.pdf