Groeseneken, GuidoGuidoGroesenekenFranco, JacopoJacopoFrancoCho, Moon JuMoon JuChoKaczer, BenBenKaczerToledano Luque, MariaMariaToledano LuqueRoussel, PhilippePhilippeRousselKauerauf, ThomasThomasKaueraufAlian, AliRezaAliRezaAlianMitard, JeromeJeromeMitardArimura, HiroakiHiroakiArimuraLin, DennisDennisLinWaldron, NiamhNiamhWaldronSioncke, SonjaSonjaSionckeWitters, LiesbethLiesbethWittersMertens, HansHansMertensRagnarsson, Lars-AkeLars-AkeRagnarssonHeyns, MarcMarcHeynsCollaert, NadineNadineCollaertThean, AaronAaronTheanSteegen, AnAnSteegen2021-10-222021-10-222014-12https://imec-publications.be/handle/20.500.12860/23883BTI reliability of advanced gate stacks for beyond silicon devices: challenges and opportunitiesProceedings paper