Vanhellemont, JanJanVanhellemontLibezny, MilanMilanLibeznySimoen, EddyEddySimoenClaeys, C.C.ClaeysClauws, P.P.ClauwsBlondeel, A.A.Blondeel2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/974Spectroscopic study of oxygen related lattice defects in annealed siliconProceedings paper