Milenin, AlexeyAlexeyMileninWitters, LiesbethLiesbethWittersDeweerdt, BrunoBrunoDeweerdtVrancken, ChristaChristaVranckenDemand, MarcMarcDemand2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21146Direct SiGe BFFT patterning by dry plasma etchingMeeting abstract