Ex situ variable angle spectroscopic ellipsometry studies on chemical vapor deposited boron-doped diamond films: layered structure and modeling aspects

Gupta, S.S.GuptaDudipala, A.A.DudipalaWilliams, OliverOliverWilliamsHaenen, KenKenHaenenBohannan, E.E.Bohannan2021-10-172021-10-1720080021-8979https://imec-publications.be/handle/20.500.12860/13828Ex situ variable angle spectroscopic ellipsometry studies on chemical vapor deposited boron-doped diamond films: layered structure and modeling aspectsJournal article