Jain, SureshSureshJainSchoenmaker, WimWimSchoenmakerLindsay, RichardRichardLindsayStolk, PeterPeterStolkDecoutere, StefaanStefaanDecoutereWillander, M.M.WillanderMaes, HermanHermanMaes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6429Transient enhanced diffusion of Boron in SiJournal article