Improving on-wafer CD correlation analysis using advanced diagnostics and across-wafer light-source monitoring

Alagna, PaoloPaoloAlagnaZurita, OmarOmarZuritaRechtsteiner, GregGregRechtsteinerLalovic, IvanIvanLalovicBekaert, JoostJoostBekaert2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23484Improving on-wafer CD correlation analysis using advanced diagnostics and across-wafer light-source monitoringProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1860281