Impact of SiO2 surface composition on trimethylsilane passivation for area-selective deposition

Soethoudt, JobJobSoethoudtCrahaij, StevenStevenCrahaijConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabie2021-10-272021-10-2720192050-7526https://imec-publications.be/handle/20.500.12860/34039Impact of SiO2 surface composition on trimethylsilane passivation for area-selective depositionJournal articlehttps://pubs.rsc.org/en/content/articlelanding/2019/tc/c9tc04091a#!divAbstract