High-Q RF inductors on low resistivity silicon realized using wafer-level packaging techniques

Carchon, GeertGeertCarchonSun, XiaoXiaoSunDe Raedt, WalterWalterDe Raedt2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7284High-Q RF inductors on low resistivity silicon realized using wafer-level packaging techniquesProceedings paper